Cirencester carried the greater attacking threat early on, and Zak Kotwica took an early shot from the left channel of the Slough penalty area, but Mark Scott gathered the ball comfortably.
Slough were quick to respond on the counter-attack, and Eddie Smith found himself one on one but his shot hit the advancing Josh Langley and Bennett headed it away from the goal-line.
With the game still being played at a frantic pace, Liddiard volleyed just past the post, and midway through the half, Scott turned away a strike from Langworthy at the expense of a corner.
In response, the industrious Ryan Hope charged through midfield and fed Lewis Putman, who was seeing a lot of the ball, and he fired a shot wide of the post from outside the area.
Minutes after Leigh Rumbold was forced off with an injury, Slough took the lead. Following a tussle between Putman and Liddiard by the corner flag, Hope stepped up to swing in a free kick from which Lee Barney produced a powerful header at the near posting, giving Langley no chance.
Chances continued to come for both sides in an open contest. Scott parried a shot from Connolly before gathering at the second attempt, and later Scott gathered a shot from Kotwica easily after good play from Langworthy.
Smith, again fed by Putman, carried the threat for Slough but his right footed shot after cutting inside from the left was saved by Langley.
Just minutes into the second half, Slough doubled their lead to set themselves up nicely for the remainder of the game. Following a long throw from Guy Hollis on the left, Lee Barney's attempted shot was met by the head of Smith, whose looping header dropped over Langley and inside the far post.
Cirencester reacted positively to this setback with a fine move down the right involving Connolly, Liddiard and Langworthy culminating in Kotwica being released, but his well struck shot from 25 yards was wide.
Putman almost inadvertently added a third Slough goal when his cross looked to have looped in at the far post, but Langley back-pedaled and tipped the ball over.
However, very soon afterwards, Slough did increase their lead. The Rebels defended a Cirencester corner kick and launched a quick counter-attack, with Jhai Dhillon clearing to Hope, who ran at the heart of the defence before slipping a pass through to Barney, who carried on into the box and sent a low left-footed drive inside the right post.
Slough had further chances, with Putman crossing in to give Barney a free header which was saved, and later almost created a chance for Warren Harris with another cross.
Cirencester, with nothing to lose, battled hard to get back into the game. Dunton had a deflected shot saved by Scott, and Kotwica fired another attempt over.
The home side were frustrated on several occasions by resolute Slough defending, but finally got on the score-sheet late on. Hooper got to the bye line and sent in a cross for Mark Pritchett, who stabbed the ball toward goal. Mark Scott saved twice from Pritchett but was powerless to stop the third attempt, with Pritchett bundling the ball over the line.
In the time that remained, Cirencester pushed men forwards but were unable to break through the stubborn Slough defence, with the Rebels always a threat on the break. On the stroke of full time, the dangerous Putman had a chance to register what would have been a deserved goal as he collected a ball in space 30 yards out, and he advanced towards goal before shooting wide of the right post.
Cirencester Town Line up
Josh Langley, Shayne Anson, Aidan Bennett (Ellis Dunton), Mark Pritchett, Matt Liddiard, Leigh Henry (c), Adam Connolly (Brad Hooper), James Mortimer-Jones, Zak Kotwica, Ross Langworthy, Ollie Knight. Sub not used: Sam Farr.